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KAKEN_18K18802seika.pdf
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Download
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紫外線硬化材料の屈折率変化を利用した3次元MEMSフォトリソグラフィ
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シガイセン コウカ ザイリョウ ノ クッセツリツ ヘンカ オ リヨウシタ 3ジゲン MEMS フォトリソグラフィ
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Shigaisen kōka zairyō no kussetsuritsu henka o riyōshita 3jigen MEMS fotorisogurafi
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3D MEMS photolithography using difference in refractive index of UV curable material
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高橋, 英俊
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タカハシ, ヒデトシ
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Takahashi, Hidetoshi
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慶應義塾大学・理工学部 (矢上) ・講師
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Research team head
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科研費研究者番号 : 90625485
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江島, 広貴
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エジマ, ヒロタカ
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Ejima, Hirotaka
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東京大学・大学院工学系研究科 (工学部) ・准教授
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Research team member
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科研費研究者番号 : 00724543
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菅, 哲朗
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カン, テツオ
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Kan, Tetsuo
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電気通信大学・大学院情報理工学研究科・准教授
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Research team member
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科研費研究者番号 : 30504815
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2020
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科学研究費補助金研究成果報告書
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2019
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本研究ではMicroElectroMechanical Systems (MEMS) の基本プロセスの1つであるフォトリソグラフィにおいて、紫外線硬化材料の硬化前後の屈折率の変化を利用した3次元微細構造を製作する方法論の確立を目指した。作製においては、紫外線硬化材料で生体適合性のあるPolyethylene Glycol Diacrylate (PEGDA) を用いた。屈折率の変化によって、照射される紫外線は材料の中を直進せず屈折し、3次元的な構造が製作される。マイクロニードルやマイクロ吸盤などの機能的な3次元微細構造の設計・製作を理論及び実験の両面から研究を遂行した。
In this research, we developed a fabrication method of a three-dimensional (3D) microstructure via photolithography, which is one of the basic Micro Electro Mechanical Systems (MEMS) processes. We realized such 3D photolithography based on refractive-indices changes of UV curable material during photo-polymerization. When such material is used, UV light ray receives refraction effect during exposure, thus changes the light path and forms 3D photo-polymerized structure. Polyethylene Glycol Diacrylate (PEGDA), which is one of the common UV curable and biocompatible materials, was used in the fabrication process. We demonstrated the 3D lithography by fabricating PEGDA microneedle array, micro suction cup array, and so on.
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研究種目 : 挑戦的研究 (萌芽)
研究期間 : 2018～2019
課題番号 : 18K18802
研究分野 : 機械工学
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