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KO12003001-00002020-0035.pdf
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Title |
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MEMS差圧センサを用いた小型風向風速センサ
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MEMS サアツ センサ オ モチイタ コガタ フウコウ フウソク センサ
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MEMS saatsu sensa o mochiita kogata fūkō fūsoku sensa
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Small airflow vector sensor using MEMS differential pressure sensor
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高橋, 英俊
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タカハシ, ヒデトシ
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Takahashi, Hidetoshi
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慶應義塾大学理工学部
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Research team head
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福澤基金運営委員会
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フクザワ キキン ウンエイ イインカイ
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Fukuzawa kikin un'ei iinkai
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2021
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福澤諭吉記念慶應義塾学事振興基金事業報告集
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2020
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本研究では、ドローンに搭載可能なMicro Electro Mechanical Systems(MEMS)差圧センサをセンサ素子とする球型の二次元風向風速センサの設計・製作を行った。センサは、二つの筐体と3つのMEMS差圧センサチップを取り付けた一つの基板から構成されるように製作した。MEMS差圧センサはピエゾ抵抗型カンチレバーをセンサ素子とし、高感度に圧力差に応答する。筐体部分を3Dプリンタで製作し、筐体内に三次元的に流路を形成した。球の直径は12.5 mmとなるように設計した。またセンサの全長は87 mmで、重さは4.4 gである。筐体には、上下面で180°対称となる二個で一組を成す孔が三組開けられており、各孔は同一平面状に60°の間隔がある。三組の孔が、三個のセンサ素子に独立して球面上に発生する圧力差を与える構造となっている。校正実験として、それぞれの空気孔に対して、-60 Pa ~ +60 Paの圧力差を10 Pa刻みで印加した際の応答を計測した。計測した範囲において、どの孔においても圧力差に対する抵抗変化率は線形性となり同等の感度を示した。また校正実験として風洞実験を行った。風速・風向に対する応答として2 ~ 10 m/sを1 m/s刻み、風向を-180°~ +180°を15°刻みで印加した際のセンサの出力を評価した。各孔の中心と風洞の風穴の中心とが同一直線上にあるときの風速と差圧の関係を計測し、その際、センサの抵抗値変化が速度の二乗に比例する関係に近いことを確認した。また風向によって出力が変化し、三組の差圧センサの出力から風向と風速を逆算できそうであることを示した。今後は、実験データから風向・風速を逆算するアルゴリズムを構築し、さらに実際にドローンに搭載し、飛行時に風速・風向を計測可能であるか評価していく。
In this study, we designed and fabricated a spherical two-dimensional airflow vector sensor using Micro Electro Mechanical Systems (MEMS) differential pressure sensors that can be mounted on a drone. The sensor consists of two enclosures and a single substrate with three MEMS differential pressure sensor chips. The enclosure was fabricated using a 3D printer, and three-dimensional flow paths were formed in the enclosure. The diameter of the sphere was designed to be 12.5 mm. The total length of the sensor is 87 mm and it weighs 4.4 g. The enclosure has three sets of holes, two of which are 180° symmetrical in the upper and lower planes, and each hole is 60° apart in the same plane. The three sets of holes provide the pressure difference generated on the sphere to the three sensor elements independently. As a calibration experiment, we measured the response of each air hole when a pressure difference from -60 Pa to +60 Pa was applied in 10 Pa increments. The fractional resistance change against the pressure difference was linear and showed the same sensitivity in all the holes. A wind tunnel experiment was also conducted as a calibration experiment. As a response to wind speed and direction, the output of the sensor was evaluated when the wind speed and direction were applied from 2 to 10 m/s in 1 m/s increments and from -180° to +180° in 15° increments. The relationship between wind speed and differential pressure was measured when the center of each hole and the center of the wind tunnel were on the same line, and it was confirmed that the resistance change of the sensor was close to the relationship proportional to the square of the speed. In addition, the output changed depending on the wind direction, and it was shown that the wind direction and wind speed could be calculated backward from the output of the three sets of differential pressure sensors. In the future, we will construct an algorithm to calculate the wind direction and speed backwards from the experimental data, and evaluate whether it is possible to measure the wind speed and direction during flight by actually installing it on a drone.
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